50X objective, part # OKHSL50: To check out the scope under realistic conditions we did acquire some surplus wafers in 6”. The wafers turned out to be some test versions, maybe for setting up a production run. We will redo these images when we get hold of a wafer in a more finished state and with finer design rules.
The digital camera used is a Moticam 2500 with 5 Megapixel. The package did include all adapters needed for this project and then some, no additional parts necessary. All images were captured at 648 x 486. Then the color balance was optimized and the images were scaled down to 200 x 150. Objective used: M Plan APO 50x NA=0.42 WD=20.5 mm Metallurgical objective.
The relatively low NA of 0.42 is an obstacle at high magnification. Field of view through eyepieces versus actual size of acquired camera image:
We used 10X eyepieces (FN 20) and eyepiece micrometer (5 mm in 100 units, 0.05 mm per unit) plus reflective stage micrometer (1mm divided in 100 parts, 0.01 mm between line centers) to determine magnification.
Field of view through eyepieces versus actual size of acquired camera image:
By comparing feature size seen through the eyepieces with the captured image we did estimate the image size to be approximately 7.4 mm wide by 5 mm high. | 
