Posted on November 24, 2010

Probe Arms for RF Probing

Image shows RF probe arms attached to full-size positioners. The arms allow you to cover all 4 quadrants of a wafer with the positioners arranged on left and right sides (West and East) of the chuck. Also note how much longer the N-S (North-South) arms are to get to the center of the chuck.
At least a mid-size positioner is needed to support these long arms.
Smaller image at right shows probe arms attached to our mid-size in-line positioners (PSEM050M).
We have one customer using the shorter probe arms (E-W) with positioner part # PSEM700V. A counter weight stops the positioner from toppling over when vacuum is removed.

For ordering probe heads see these pages:
RF probe heads
Multi Contact heads

Please contact us if you need something special.

Click thumbnail for more info and shopping cart.

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Description

Part # / Price

RF Probe Arms

RF Probe arm with fine theta adjustment for mid-sized positioner, E-W

PSERFA50EW   £510  US$789

RF Probe arm with fine theta adjustment for mid-sized positioner, N-S

PSERFA50NS     £510 US$789

RF Probe arm with fine theta adjustment for large positioner, E-W

PSERFA05EW   £574  US$889

RF Probe arm with fine theta adjustment for large positioner, N-S

PSERFA05NS     £574 US$889

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